The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor
نویسندگان
چکیده
منابع مشابه
A mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملa mechanical micro molecular mass sensor
one of the bio-sensing mechanisms is mechanical. rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. this study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on silicon wafer, with the ...
متن کاملResonating Silicon Beam Force Sensor
A resonating silicon-beam force sensor is being developed using micromachining of silicon and IC-compatible processes. Results are reported here of measurements on the force-to-frequency transfer of bare silicon prototypes. The measurements with forces on the sensor beam up to 0.4 N show a frequency shift of 3.1 to 5.2 times the unloaded resonance frequency f. (fo = 3 to 5 kHz), depending on th...
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flow in natural river bends is a complex and turbulent phenomenon which affects the scour and sedimentations and causes an irregular bed topography on the bed. for the reason, the flow hydralics and the parameters which affect the flow to be studied and understand. in this study the effect of bed and wall roughness using the software fluent discussed in a sharp 90-degree flume bend with 40.3cm ...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1991
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)80029-o